Yu Zou; Jintang Shang; Yu Ji; Li Zhang; Chiming Lai; Dong Chen; Kim-Hui Chen, Study on volume production of uniform wafer-level micro glass cavities by a chemical foaming process (CFP), Electronic Packaging Technology (ICEPT), 2013 14th International Conf
作者:Yu Zou; Jintang Shang; Yu Ji; Li Zhang; Chiming Lai; Dong Chen; Kim-Hui Chen 发表日期:2013-07-01

Yu Zou; Jintang Shang; Yu Ji; Li Zhang; Chiming Lai; Dong Chen; Kim-Hui Chen,

Study on volume production of uniform wafer-level micro glass cavities by a chemical foaming process (CFP),

Electronic Packaging Technology (ICEPT), 2013 14th International Conference on, DOI: 10. 1109/ICEPT. 2013. 6756565, IEEE

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