实验室概况

                               MEMS教育部重点实验室(南高院东)大门

     

        MEMS,即微电子机械系统,就是利用可批量化制造的微电子工艺,设计、制作和集成各类微小机械结构与系统的新兴技术,被誉为“微观世界的建筑学”。面对系统智能化、微型化、集成化发展的时代需求,东南大学以微电子学与固体电子学学科为主体、联合工程力学和机械工程学科,组建了MEMS实验室。               

         MEMS教育部重点实验室于20019月通过教育部验收正式成立,2002年和2007年先后顺利通过教育部评估。实验室依托东南大学电子科学与技术一级学科国家重点学科,聘请国内外MEMS行业一流学者成立专家委员会,是国家“211”工程、“985”工程重点建设部门。目前用房面积逾3200平方米,中心实验室固定人员33人,其中教授9人、副教授12人。科研团队中有教育部“长江学者奖励计划”特聘教授1人,国家杰出青年科学基金获得者2人,教育部“新世纪人才支持计划”入选者5人。每年招收硕士约30人,博士约10人。
       秉持“多元、协作、卓越”的发展理念,以国家需求为导向,面向国际前沿,实验室在CMOS MEMSRF MEMSMEMS CADMEMS封装与可靠性、NEMS等方向上成立了专业的研究团队,团结合作,锐意进取,逐步发展成为国内外知名的MEMS研究基地。近5年承研国家重大专项2项,973课题2项,863课题10项,国家自然科学基金16项,其中重点项目2项,总研究经费逾6000万元;研究成果获国家技术发明二等奖1项、江苏省科技进步一等奖1项、教育部自然科学奖一等奖1项。


                                                                          

                            MEMS教育部重点实验室(礼西)大门

                                                 

    近五年已发表SCI收录论文140余篇、发明专利授权100余项,专著、译著逾10部,3项科研成果转化应用,在MEMS领域顶级期刊JMEMS上发表论文9篇,居国内高校领先水平。在Nature Nanotechnology, Nano LettersAdvanced Materials, PRLAPLLab on ChipJMMS&A等微纳系统领域相关重要期刊上也发表大量优秀论文。所研制的微型气象站系统和智能路面传感器系统已投入实用。   

             

Accompanied by the Ancient Pine-tree and the Great Auditorium, the Key Laboratory of MEMS of Ministry of

Education is situated in the Nan-Gao Mansion, a classical architecture of Southeast University. 

 

The origin of microelectronic mechanical-systems group in Southeast University (SEU MEMS) can be dated

back to 1983 when the first silicon flow sensor research in Chinawas declared success in a small clean room in Nanjing Institute of Technology, the predecessor of Southeast University. From then on, their researchers with courage and insight have made more and more fundamental breakthroughs in nearly all fields of early MEMS,

including simulation, fabrication, integration, and concept design of novel miniaturized sensors. In1999, the

university started to submit an application to the government for the establishment of a professional laboratory of MEMS nationwide. Two years later, the key laboratory of MEMS of the Ministry of Education of China

announces its birth. 

 

Thanks to the funding support of the government, SEU MEMS now runs a faculty of 8 professors, 10 associate professors, over 100 graduates and over20 Ph. D students. The experienced groups have built core

competence top resides or cooperate in national projects including National Key Basic Research Support

Foundation (973 program), National High Technology R&D Program (863program), National Major S&T

Program, and other major projects from the ministry and the province.

 

In the next years, MEMS laboratory concentrated its efforts to fulfill the requirements of the nation and discover the new lands of the micro-world. Professional sections were set up that focus on CMOSMEMS, RF MEMS,

MEMS CAD, MEMS packaging and reliability, and NEMS, respectively. In parallel with the accumulation of

fundamental technologies, the laboratory also seeks to grasp the R&D experience of smart micro system

products. On-chip weather station and road surface sensor system has been developed successfully and their products is being put into market.. Besides dozens of granted patents, MEMS laboratory has published over

thirty ranking articles in top MEMS and physics journal, like Nature Nanotechnology, Nano Letters, Advanced

Materials, PRL,APL, Lab on Chip, JMEMS, JMM, S&A and so on. Their inventions and products, such as the on-chip weather station, in-situ characterization system of MEMS material properties and silicon-based 3D

integration technology, have won top science an technology awards from the Nation, the Ministry of Education, and the JiangSu Province.

东南大学微电子机械系统教育部重点实验室 版权所有
地址:南京四牌楼二号南高院(东门)MEMS教育部重点实验室 电话:025-83794642-8840 E-mail:jiangmx@seu.edu.cn